durusmail: mems-talk: Silica-on-Si Wafers
Silica-on-Si Wafers
2000-11-02
Silica-on-Si Wafers
Wilfried Noell
2000-11-02
Hello MEMS community,

I am looking for silica-on-silicon wafers, or better:
100mm (4") Si wafers with an approx. 15 micron thick SiO2 layer.
The SiO2 maybe either PECVD or thermally grown.

Any hint is highly appreciated!

Best regards
Wilfried Noell


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