durusmail: mems-talk: Re: Colour of SiO2 layers on Silicon
Re: Colour of SiO2 layers on Silicon
2000-01-17
Re: Colour of SiO2 layers on Silicon
Winston Chan
2000-01-17
Simon M. Sze's book "The Physics of Semiconductor Devices" has a table.
It is certainly in the first edition and probably in the second edition
as well. I don't have my copy handy, but it is in the chapter on MIS
devices (first edition) if I remember correctly.

Also, check the website

http://ostc.physics.uiowa.edu/~wkchan/EM/PROGRAMS/THINFILM

for a Java applet that calculates the colors for you.

Winston


Yit-shun Leung Ki wrote:
>
> Hi,
>
> Could anyone tell me where I can find a table of the colours which SiO2
> layers make on Silicon at different thicknesses?
>
> Thanks
>
> Y.
> Yit-shun Leung Ki
> Graduate student (microfluidics)
>
> IMS-DMT, EPFL,  Batnment BM,  CH-1015 Lausanne (CH)
> Tel.: +41 21 693 7818   Fax.:+41 21 693 5950
>


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