Dear Zou Quanbo,

How did you cool down the sample after the heat treatment?

Regards,

Sonia.
-----
Sonia Garcia Blanco
Department of EE
University of Glasgow
G3 8PE
Glasgow



On Mon, 27 Dec 1999, Zou Quanbo wrote:

> Dear all,
>
> I experienced that the electric resistivity of Cr/Au bi-layer thin-film
> resistor was drastically increased after a thermal treatment. The process
> condition was: rough vacuum (~Torr), 380 degC, 2 hours. Cr/Au
> (thickness=1k/3k angstroms) are on Pyrex substrate (sputtered on). The
> resulted resistivity was ~20 times higher than un-treated samples.
>
> Does any one know what happened to this? I appreciate if somebody can help
> explain and maybe solve this problem.
>
> Thanks and best regards,
>
> Merry X'mas and Happy New Year!
>
> Quanbo Zou
> =================================
> Dr. Quanbo Zou
> MEMS Department
> Institute of Microelectronics
> 11 Science Park Road
> Singapore Science Park II
> Singapore 117685
> Tel: 65-7705905(O) 65-2642113(H)
> Fax: 65-7731915
> Email: quanbo@ime.org.sg
> ================================
>
>