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Dear Quanbo,
This effect has been examined mainly during the 1970s when gold
interconnection lines were still in wider use. In short: Chromium is =
not
soluble in bulk Au but it is soluble in Au grain boundaries. Cr will =
thus
diffuse through the thin film grain boundaries and so increase their
resistance. Since a grain boundary may extend over the whole width of a
metal runner, a small amount of Cr can cause a large increase of the =
runner
resistance. You may have observed that this resistance is not constant =
over
short periods of time (seconds) but readily varies by 10...100%.
On the surface, Cr is oxidised and as an oxide will not travel back, so
after some time, all the Cr has accumulated on the surface. The =
adhesion
layer has then disappeared and eventually the high resistance of the
metallization will return to its original value (nearly).
Hope to have helped you; for literature see among others:
* Munitz, A.; Komem, Y.: Structural and resistivity changes in =
heat-treated
chromium-gold films. In: Thin Solid Films 37 (1976) , pp. 171-179.
* Gupta, D.; Ho, P.S. : Diffusion Processes in Thin Films. In: Thin =
Solid
Films 72 (1980) , pp. 399-418.
* Richards, J.L.; McCann, W.H.: Low Temperature Diffusion in =
Polycrystalline
Thin-Film Gold-Nickel Couples. In: Journal of Vacuum Science and =
Technology
(1969) , pp. 644-647.
* Hieber, H.: Aging Properties of Gold Layers with Different Adhesion
Layers. In: Thin Solid Films 37 (1976) , pp. 335-343.
* Holloway, P.H.; Amos, D.E.; Nelson, G.C.: Analysis of grain-boundary
diffusion in thin films: Chromium in gold. In: Journal of Applied =
Physics 47
(1976) , 9 , pp. 3769-3775.
* Audino, R.; Gestefanis, G.: Interface Behaviour Evaluation in Au/Cr, =
Au/Ti
and Au/Pd/Ti Thin Films by Means of Resistivity and Stylus =
Measurements. In:
Thin Solid Films 36 (1976) , pp. 343-347.
* Munitz, A.; Komem, Y.: The Increase in the Electrical Resistance of
Heat-Treated Au/Cr Films. In: Thin Solid Films 71 (1980) , pp. 177-188.
* Yan, B.; Lin, T.; Mao, D.; Yang, C.: Interdiffusion of an Au/Ni/Cr
multilayer metallization on silicon substrates. In: Thin Solid Films =
173
(1989) , pp. 39-51.
* George, M.A.; Glaunsinger, W.S.; Thundat, T; Lindsay, S.M.: =
Electrical,
Spectroscopic, and Morphological Investigation of Chromium Diffusion =
Through
Gold Films. In: Thin Solid Films 189 (1990) , S. 59-72.
Yours sincerely, Kai Hiltmann
Kai Hiltmann, HSG-IMIT, Wilhelm-Schickard-Str. 10, D-78052
Villingen-Schwenningen, Germany
Ext. ++49-7721-943-132, Fax ++49-7721-943-140
-----Urspr=FCngliche Nachricht-----
Von: Zou Quanbo [mailto:Quanbo@ime.org.sg]
Gesendet am: Montag, 27. Dezember 1999 03:23
An: MEMS@ISI.EDU
Betreff: Cr/Au thermal-electric property
Dear all,
I experienced that the electric resistivity of Cr/Au bi-layer thin-film
resistor was drastically increased after a thermal treatment. The =
process
condition was: rough vacuum (~Torr), 380 degC, 2 hours. Cr/Au
(thickness=3D1k/3k angstroms) are on Pyrex substrate (sputtered on). =
The
resulted resistivity was ~20 times higher than un-treated samples.
Does any one know what happened to this? I appreciate if somebody can =
help
explain and maybe solve this problem.
Thanks and best regards,
Merry X'mas and Happy New Year!
Quanbo Zou
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D
Dr. Quanbo Zou
MEMS Department
Institute of Microelectronics
11 Science Park Road
Singapore Science Park II
Singapore 117685
Tel: 65-7705905(O) 65-2642113(H)
Fax: 65-7731915
Email: quanbo@ime.org.sg
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D
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