durusmail: mems-talk: Sputtering Materials and problems
Sputtering Materials and problems
2000-12-29
Sputtering Materials and problems
suan choy
2000-12-29
Hi all,
Can any one tell me about the materials . What are the
characteristics or functions of Cr,
Platinum, Boron, Molibdenum, Tandulum in sputtering?
there is an issue of arcing which
causes particulates on the discs. what can we do to
reduce or even eliminate these?
 ps kindly reply to hooichoy.suan@komag.com

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