You can also try Pulsed-Laser Deposition (PLD).

Abmi


--

On Thu, 13 Jan 2000 10:26:17   Dunn, Steve wrote:
>Hi there,
>
>I was wondering if anyone has any success producing a thin film of alumina
>(ca 300 nm) on SiO2 or SiNx. We are hoping to use a spin coating technique,
>is this feasible any refs or recipes or suppliers?
>
>Best regards
>
>Steve Dunn
>
>
>
>
>Dr S Dunn
>Building 70, Nanotechnology,
>Cranfield University,
>Cranfield, MK43 0AL
>UK
>
>


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