Hello Andreas, Most of the European foundries are still running 4" wafers and many are planning not to switch to 6" until they are forced through supply of equipment for 4" etc. To my knowledge the following European foundries handle 6" Si wafers: -BOSCH - Reutlingen, Germany -Colibrys - Neuchatel, Switzerland (foundry spin off from CSEM in January 2001) -FhG ISiT - Itzehoe, Germany -OnStream, Holland -ST, Italy and X-Fab in Erfurt that you certainly know well There are relatively more in the US the offer 6" wafer capacities. Unfortunately, almost all of them will not be interested in small volumes (however it is not always the volume that counts). To my knowledge most R&D institutions do not offer 6" wafer runs, but generally 4". One possibility might be the CMI at the EPFL in Lausanne. They have really 'nice' cleanroom facilities running on 6". You may contact Prof. Philippe Renaud (philippe.renaud@epfl.ch). If you need more information, your are welcome to contact me. Best regards Gerold ---- Dr. Gerold Schröpfer Foundry Program Manager COVENTOR Sarl 3 Avenue du Quebec ZI de Courtaboeuf 91140 Villebon sur Yvette France Tel: +33 (0)1 69 29 84 85 Fax: +33 (0)1 69 29 84 88 Mobile: +33 (0)6 75 01 43 57 COVENTOR: http://www.coventor.com -----Original Message----- From: Andreas Albrecht [mailto:aalbrecht@cismst.de] Sent: Friday, February 16, 2001 5:58 PM To: MEMS@ISI.EDU Subject: Si wafer facilities for microsystem fabrication Dear colleagues who knows Si wafer manufacturing facilities in R&D institutes (because of small to medium volume production) prefered in Germany and could tell me which wafer sizes are processed there. There is an urgent need for 6" wafer foundry processes. Regards Andreas Albrecht Transferzentrum Mikroelektronik e.V. In den Weiden 7 D-99099 Erfurt Tel. +49-(0)361-42051-75 Fax +49-(0)361-42051-76