> > Silicon is a strong material they say.... > > We have put our bulk micromachined silicon chips in a plastic > package. Some of the chips breaks or we can se fine cracks, usually > close to the v-grooves. There is a bonded glass lid on top of the > v-grooves that should strengthen the device. The chips also had been > edge polished after dicing with 3 microns and 0.3 micron papers. Do > anyone know if the polishing itself can lower the mechanical strength > of the chips? Or is the dicing bad enough? > > Hakan Elderstig >