durusmail: mems-talk: Re: Mechanical properties of Si chips.
Re: Mechanical properties of Si chips.
1996-04-17
1996-04-17
1996-04-18
Re: Mechanical properties of Si chips.
Alexander Holke
1996-04-18
>
> Silicon is a strong material they say....
>
> We have put our bulk micromachined silicon chips in a plastic
> package. Some of the chips breaks or we can  se fine cracks, usually
> close to the v-grooves. There is a bonded glass lid on top of the
> v-grooves that should strengthen the device. The chips also had been
> edge polished after dicing with 3 microns and 0.3 micron papers.  Do
> anyone know if the polishing itself can lower the mechanical strength
> of the chips? Or is the dicing bad enough?
>
> Hakan Elderstig
>


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