Aluminum etch (Phosphoric - Acetic acid based) is great for patterning Ni.
You can use Piranha to bulk strip the Ni.

>>> "Elizabeth Chalmers"  02/27/01 03:07PM >>>
Hi, I am an engineering student at Boston University
and I'm interested in finding an etchant (wet or
reactive ion gas) that will attack a nickel film
selectively, but leave the photoresist relatively
unetched.  Do you have any ideas?  Thank you very much
for your time,

Elizabeth Chalmers


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