Please can someone suggest a suitable coating to protect Si from scratches.
A simple resist does not seem to do the job. We have treid s1818. The
suggested coating should be resistant to KOH.

Thanks
Asif Aziz


a.aziz@physics.gla.ac.uk

Asif Aziz
Department of Physics and Astronomy
Kelvin Building
University of Glasgow
University Avenue
Glasgow
G12 8QQ

Tel. no. +44 141 339 8855 extn 0896