durusmail: mems-talk: millimetre think film of SU-8
millimetre think film of SU-8
2001-03-22
millimetre think film of SU-8
Amit Asthana
2001-03-22
Dear All,
I would like to coat a 1-2 millimetre think film of SU-8 on glass surface.
    * I would like to know whether any of you have experience of  obtaining
thicker coats, up to 2 mm, by making  several coat of the resin?  And how
mush time it usually take to obtain such think film.
    * My intensions are to first produce a 10µm thick feature followed by
feature of  around 1-2 millimetres thickness close to 10µm feature . Is it
possible to do this without damaging the first 10µm structure? I both the
feature on same surface?
I shall be grateful if somebody can share there experience regarding think
SU8 coating.Thanking you,
best regards
Amit


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