durusmail: mems-talk: questions regarding to RuO2 or IrO2
questions regarding to RuO2 or IrO2
questions regarding to RuO2 or IrO2
jzhang@paratek.com
2001-03-29
I am trying to use MOD (metal organic deposition) method to deposit RuO2 or
IrO2. What type of solvent and composition should be used? What is the
processing parameters?

Your help is very much appreciated!

Jessie Zhang


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