durusmail: mems-talk: Robot end effector for handling bowed wafers
Robot end effector for handling bowed wafers
Robot end effector for handling bowed wafers
ewolfe@astex.com
2001-03-29
We presently are having trouble handling wafers with more than ~60 microns
bow with our present (vacuum) end effector.  Does anyone sell an end
effector that can reliably handle wafers up to ~ 300 micron bow (even 200
would be better than present ability)?  End effector will be exposed to ~
200 degree C wafers after processing in machine.

thanks,
Ed Wolfe


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