I am searching for a MEMS research institute or a company that can arrange a long training course (at least one month ), the course subject is ICP- Bosch process ( DRIE ) , Silicone deep etching. I prefer that the training will be by using a Plasma-Therm (Unaxis) ICP equipment. Does any one of this newsgroup know to whom shall I apply? Many thanks for any help. Dr. Haim Shalev E-mail haimsh@rafael.co.il Fax: 972-4-8795453