Hello,

I am going to use black wax to protect the backside of Si during KOH
etching. I was told that black wax can be spin-coated on Si when it is
dissoved in certain organic solvent. Does anyone know which solvent is the
best candidate for this work? What is the ratio of wax and solvent?
How to bake the film after spin-coating?
Thank you in advance.

Weijie Wang