durusmail: mems-talk: RIE
RIE
Jiangang Du (John Duke)
2001-04-20
Hi,pal:
Who can tell me where I can find service to reactive ion etch by
100W,6sccm oxgen gas plasma? Service near Cleveland is preferred.
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Regards,
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John Duke
EECS Dept.
Case Western Reserve Univ.
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