Hi, everyone:


     I have one question. I want to remove the bulk Si from SOI with my
sample(1.5cm*1.5cm),I used the KOH to etch the Si, but KOH is easy to
attact the sample after 2-3 hrs using black Wax covered sample. I would
like to use the deep RIE to
remove the bulk Si, would you tell me which RIE equipment can etch Si from
small
piece samples?

     Thank you very much.

     Qifa
     The Penn State University