MEMS researchers,
I am looking for simple process simulation tools for MUMPS or any other microfab
processes. Does anyone know of shareware or free tools in this area? Basically,
I want to verify what sort of dimensions and structures I can get out of
different materials.The tools do not have to support any exotic research
processes.

I am planning to do some design in the area of Micromotors/actuators. I want to
concentrate on the FE analysis and converting it to VHDL AMS models, but I still
do need to have some physical fab model to start with.

Also, is anyone developing such a process simulation tool?

P.S. if anyone is looking for research assistant for the sort of project I've
mentioned above (electromagnetic and electromechanical design and analysis, FE
etc.), send me a mail.

Thanks

Yasir Suhail
INDIA


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