Thers is a paragraph talking about the vertical
sidewalls on Si(100) wafer by wet etch in Marc Madou's
"Fundamentals of Microfabrication" (p151).

Does anyone can share his experiences or the related
info?

Thanx!


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Bo-Kuai Lai
Departmet of Materials Science nd Engineering
Case Western Reserve University
10900 Euclid Ave.
Cleveland, Ohio 44106
Phone: 216-368-4819
Fax:   216-368-4209

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