durusmail: mems-talk: Sources for SOI wafers
Sources for SOI wafers
2001-02-07
Sources for SOI wafers
Dinh Ton
2001-02-07
Hi everyone,

I wonder if you can help me.  I am looking for sources
of SOI wafers.  I probably need like 5-10 for my experiment
to make mirrors.

The wafers is of the following specs:
Top Si - EPI layer : > 2 um,
                     Resistance < 1 Ohm-cm
                     <100> Orientation - P-type.
Oxide Layer : ~ 2um
Bottom Si layer : 500 um thick +/- 100 um
                  Resistance > 5 Ohm-cm
                  <100> P-type..

If you happen to know where I can get it quickly please let me
know.

Thank you,
Dinh Ton


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