Ed, Frequency response of MEMS acceleration sensor is a function of the
acceleration range. I believe that Endevco has high g ranges of silicon
acceleration sensors operating up to 100 kHz.

I am planning to start developing the silicon acceleration sensors next year.
If your program can wait that long, let me know more details about your program
(specs, quantities, timing, target prices, etc.0

Good luck
Dr. Janusz Bryzek
President
Intelligent MicroSensor Technology