We were wondering if anyone had information beyond the MSDS sheets on the
toxicity of EDP ?

We have been using EDP for quite awhile and take various precautions when
working with it. For the last year, we have been transfering most of our SI
etch work to safer etches (KOH, TMAH), however, we have one production process
that seems to need EDP for decent yields. For this reason, we decided to spend
some time looking into EDP toxicity. Any help would be greatly aprreciatated.

Ken Westra
Staff Scientist -- Alberta Microelectronic Centre
westra@amc.ab.ca