For a few holes, you could try a wire of the desired diameter in a small drill press, diamond abrasive, and a support for the glass that controls the force to small values, such as setting the glass on urethane foam. Dear MEMS colleagues, As a part of my thesis I am interested in making several small = diameter holes (100-200 micron) in a thin layer of glass (400-500 = micron), along a 20 mm line. Then I need to fill the holes with gold or = any other metal. I would like to know if anyone knows any methods to drill or etch = those holes in glass ( Pyrex, BK-7, CdTe, BaF2 or any other material = that allows transmission in the visible and IR wavelengths as well). I would appreciate if anyone can tell me of a manufacturer that can make = these holes.=20 =20 P.S. I choose glass because of its relative high thermal isolation = property. Thank you in advance, Danny Klein -----------------------------------------------------