durusmail: mems-talk: Re: processing information wanted
Re: processing information wanted
Re: processing information wanted
Mike Gibbs
1996-05-29
In response to the request for processing information on to polyimide

We have successfully sputter deposited a range of transition metals and
transition metal alloys onto Kapton with good adhesion. The substrate is
dgreased using standard solvents, and only given a very short sputter clean
before growth.

Maximum thickness we have tried is 1 micron.


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