Hi Gabriela, we have been working on performing temperature meaurements using patterned platinum resistors mounted as lids or supports for silicon microreactor cavities. We have also looked at using very small thermocouples (hair-like and quite fiddly to use) and non-contact infra-red thermocouples (in practice the least successful mode). If you would like some more information about any of these, let me know. We could also probably send you some of the platinum resistors (they are fabricated on pyrex) or if you sent over some of your devices, we could try and put together some configuration that you could use. All the best, Dr. Helen Berney. National Microelectronics Research Centre, LeeMaltings,Cork,Ireland. Tel +353-21-4904010 Fax +353-21-4270271 Email hberney@nmrc.ie G juarez Martinez wrote: > Hi! > > I am trying to measure the temperature inside miniaturised (3mmx1mm) Si > chambers. This chambers are set in a row, each of them is held at constant > but different temperature (4-40C). I have check the temperature with a > commercial temperature probe. But due that the temperature probe is too > large, I am a bit worry that I not getting an accurate reading (the > enviroment that can be affecting the temperature of the probe). > I want to do a cross checking with other technique or device.... > > Could anybody suggest one? (one that can be accurate at least at 0.5C) > > Thanks in advance, > Gabriela > ****************************************************************************** > Gabriela Juarez-Martinez > Dep. Electronics Tel +(0) 141 330 5764 > Rankine Building. Fax +(0) 141 330 4907 > University of Glasgow > Glasgow G12 8LT > Scotland. UK. > _______________________________________________ > mems-talk mailing list > mems-talk@memsnet.org > To unsubscribe or change your list options, use: > http://fab.mems-exchange.org/mailman/listinfo/mems-talk