Hello,
I am trying to find a hermetic sealing method for
Plastics packaging (PEI, or PPS), glass frit method requires
higher temperature than I expect. Anybody has ohter thoughts
beside epoxy and welding seal?
Thanks.
Rong
-----Original Message-----
From: mems-talk-request@memsnet.org
[mailto:mems-talk-request@memsnet.org]
Sent: Wednesday, October 03, 2001 11:01 AM
To: mems-talk@memsnet.org
Subject: mems-talk digest, Vol 1 #61 - 8 msgs
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When replying, please edit your Subject line so it is more specific
than "Re: Contents of mems-talk digest..."
Today's Topics:
1. Re: Temperature measurements (Helen Berney)
2. Electric breakdown in MEMS air gap (Lidu Huang)
3. Diffusivity and Solubility of metals in Silicon (Ali Khalil)
4. Wear rate of Ni(80)-Fe(20) Permalloy (Sanghoon Lee)
5. RE: laser drilling (Tan Joo Lett)
6. Micron thickness silicon wafers (APPCHUNG)
7. surface energy of MEMS materials (Philippe Luginbuhl)
8. Re: Micron thickness silicon wafers (Kenneth Smith)
--__--__--
Message: 1
Date: Tue, 02 Oct 2001 17:19:04 +0100
From: Helen Berney
Organization: National Microelectronics Research Centre, Prospect Row,
Cork, Ireland.
To: G juarez Martinez , mems-talk@memsnet.org
Subject: Re: [mems-talk] Temperature measurements
Hi Gabriela,
we have been working on performing temperature meaurements using patterned
platinum resistors mounted as lids or supports for silicon microreactor
cavities.
We have also looked at using very small thermocouples (hair-like and quite
fiddly
to use) and non-contact infra-red thermocouples (in practice the least
successful
mode). If you would like some more information about any of these, let me
know.
We could also probably send you some of the platinum resistors (they are
fabricated on pyrex) or if you sent over some of your devices, we could try
and
put together some configuration that you could use.
All the best,
Dr. Helen Berney.
National Microelectronics Research Centre, LeeMaltings,Cork,Ireland.
Tel +353-21-4904010 Fax +353-21-4270271 Email hberney@nmrc.ie
G juarez Martinez wrote:
> Hi!
>
> I am trying to measure the temperature inside miniaturised (3mmx1mm) Si
> chambers. This chambers are set in a row, each of them is held at constant
> but different temperature (4-40C). I have check the temperature with a
> commercial temperature probe. But due that the temperature probe is too
> large, I am a bit worry that I not getting an accurate reading (the
> enviroment that can be affecting the temperature of the probe).
> I want to do a cross checking with other technique or device....
>
> Could anybody suggest one? (one that can be accurate at least at 0.5C)
>
> Thanks in advance,
> Gabriela
>
****************************************************************************
**
> Gabriela Juarez-Martinez
> Dep. Electronics Tel +(0) 141 330 5764
> Rankine Building. Fax +(0) 141 330 4907
> University of Glasgow
> Glasgow G12 8LT
> Scotland. UK.
> _______________________________________________
> mems-talk mailing list
> mems-talk@memsnet.org
> To unsubscribe or change your list options, use:
> http://fab.mems-exchange.org/mailman/listinfo/mems-talk
--__--__--
Message: 2
Date: Tue, 02 Oct 2001 11:32:57 -0700
From: Lidu Huang
Organization: Fujitsu Laboratories of America
To: mems-talk@memsnet.org
Subject: [mems-talk] Electric breakdown in MEMS air gap
Hi,
Could someone provide some data on electric breakdown
in MEMS air gap?
For usual electro-mechanical device, the electric field
strength to prevent arcing is typically set at 3 (V/um).
Would the breakdown strength be higher for MEMS devices?
Thanks!
Lidu Huang
--__--__--
Message: 3
Date: Wed, 03 Oct 2001 12:02:59 +1000
From: Ali Khalil
Reply-To: ali111@rsphysse.anu.edu.au
Organization: ANU
To: mems-talk@memsnet.org
Subject: [mems-talk] Diffusivity and Solubility of metals in Silicon
Hello,
I would very much appreciate if anybody could provide me with the
following:
Diffusivity (cm2/s) and solubility of Pd, Fe and Cu in monocrystalline
Si
I am mostly interested in values at a temperatures above 700 C.
I would greatly appreciate your help if or you can recommend a
reference, web site or
any info.
Thank you
Ali Khalil
--__--__--
Message: 4
From: "Sanghoon Lee"
To:
Date: Tue, 2 Oct 2001 22:13:11 -0600
Subject: [mems-talk] Wear rate of Ni(80)-Fe(20) Permalloy
Hi,
I'm looking for some experimental data of Ni-Fe permalloy
which has been used as a rotor and bearing material
in a magnetic micromotor (variable-reluctance motor).
Doing the frictional study of that kind of actuators, I need
the wear rate and friction coefficient of the above material.
Could someone provide some data?
Sanghoon Lee
====================================================
Research Assistant
University of Texas - Austin
Dept. of Mechanical Engr.
(512) 471-0968
onandon@mail.utexas.edu
====================================================
--__--__--
Message: 5
From: Tan Joo Lett
To: mems-talk@memsnet.org
Subject: RE: [mems-talk] laser drilling
Date: Wed, 3 Oct 2001 14:23:08 +0800
If the ceramic you are using is alumina, the black spots are likely to be
aluminium or some other form of aluminium oxide. What assist gas are you
using?
If you are using a CO2 laser, you could try using Scotch tape (and yes, I am
referring to the brand. I find their Magic Tape works the best) on the
surface. Of course, you'll have to clean off the adhesive later but acetone
works nicely.
-----Original Message-----
From: Adnan Merhaba [SMTP:AMerhaba@atceramics.com]
Sent: Tuesday, October 02, 2001 2:54 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] laser drilling
Hello,
I have a couple of questions with regard to laser drilling of
ceramics:
- during laser drilling, we have observed black spots around the
drilled
holes, I am curious to know where do they originate from (earlier it
was
believed that the emulsitone that was applied onto the ceramic
prior to
drilling lead to carbon deposits, but I find it hard to believe that
carbon
doesnt get oxidized at high temperatures in an oxygen environment).
- secondly is there anyway to remove slags around the holes during
the
drilling operation (say for e.g. by using coolants etc.), this is a
concern
because when we remove the slag after the drilling operation by
scrubbing,
we leave the substrate with plenty of scratches, so ideally I would
like to
remove the slag as and when they are formed.
Thank you for your patience.
Regards,
Adnan Merhaba
Thin film process engineer
American Technical Ceramics
Jacksonville, Florida
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--__--__--
Message: 6
Date: Wed, 03 Oct 2001 15:31:48 +0800
From: APPCHUNG
To: mems-talk@memsnet.org
Subject: [mems-talk] Micron thickness silicon wafers
Hi,
Does anyone know any supplier/manufacturer of 5-20 micron thick silicon
wafers?
Thanks!
Jonathan
--
Dr. Jonathan C.Y. Chung, Associate Professor
G6713, Dept of Physics & Materials Science
City University of Hong Kong
83 Tat Chee Avenue, Kowloon Tong, HONG KONG
Tel:(852) 27887835 Fax:(852) 27887830
email: Jonathan.C.Y.Chung@cityu.edu.hk or chungchiyuen@hongkong.com
--__--__--
Message: 7
From: "Philippe Luginbuhl"
To:
Date: Wed, 3 Oct 2001 13:38:33 +0200
Subject: [mems-talk] surface energy of MEMS materials
Dear MEMS readers,
I would like to now if it is possible to find informations about the surface
energy (and the surface tension if it is not equal to the surface energy) of
common materials used for MEMS applications, for example the surface energy
of
Si, SiO2, Si3N4 etc.
Thank you very much
Ph. Luginbuhl
Dr. Ph. Luginbuhl
Microflow Engineering S.A.
Head of Aerosol Systems Research & Development
Rue Jaquet Droz 7
CH- 2007 Neuchbtel
Switzerland
Phone: + 41 32 720 51 61
Phone (direct): + 41 32 720 54 78
Fax: + 41 32 720 57 89
www.microflow.ch
e-mail: pluginbuhl@microflow.ch
--__--__--
Message: 8
Date: Wed, 03 Oct 2001 07:21:37 -0700
From: Kenneth Smith
Organization: Kmbh Associates
To: APPCHUNG
CC: mems-talk@memsnet.org
Subject: Re: [mems-talk] Micron thickness silicon wafers
The only company that I have heard of that is doing wafers this thin is
Valley Design http://www.valleydesign.com They had told me in the past
that they could handle a 23um request that I had at the time. I know
that their thin wafers are shipped attached to their mounting medium
(not sure what it is).
I know of several that can do 50um, but 5-20 is well beyond their
capability.
Best Regards,
Ken Smith
Kmbh Associates
4968 Charter Road
Rocklin, CA 95765 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Stock wafers in FZ, CZ and SOI ready for Immediate shipment.
APPCHUNG wrote:
>
> Hi,
>
> Does anyone know any supplier/manufacturer of 5-20 micron thick silicon
> wafers?
>
> Thanks!
> Jonathan
> --
> Dr. Jonathan C.Y. Chung, Associate Professor
> G6713, Dept of Physics & Materials Science
> City University of Hong Kong
> 83 Tat Chee Avenue, Kowloon Tong, HONG KONG
> Tel:(852) 27887835 Fax:(852) 27887830
> email: Jonathan.C.Y.Chung@cityu.edu.hk or chungchiyuen@hongkong.com
> _______________________________________________
> mems-talk mailing list
> mems-talk@memsnet.org
> To unsubscribe or change your list options, use:
> http://fab.mems-exchange.org/mailman/listinfo/mems-talk
--
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