Hi, friends,

I have some problem in bonding Au layer with Pyrex glass with photoresist.
Now the thin Au layer was grown on the wafer. Photoresist was spinned onto
the Au layer, and patterned. Next step was to bond the glass with Au layer
with this patterned photoresist.
However, the post-developed photoresist was not adhesive so that the
bonding was failed.
Does anybody know or have experience in this kind of bonding? Other
materials or bonding methods are greatly appreciated. Thanks.



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Tao YU
Department of Electrical & Computer Engineering
Colorado State University
Fort Collins, CO 80523
USA
Phone: (970)-491-5225 (Lab)
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