Hello. I've been working on the design of MEMS switches since a couple of
months ago (I'm a beginner in the field.). I've been reading many papers
relevant to that topic, but it has been very hard to get the stuffs which
includes how to determine the parameters of the devices. Most of them
I've studied just have sizes of the devices they have made, not
explaining how to get them. Does anyone suggest me the books or papers to
describe how to design the parameters of the devices? Or recommend me
fundamentals and useful books related to MEMS? I'll be very grateful to
have you help me.Thanks. Hyunju from Korea.

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