durusmail: mems-talk: TiN coatings
TiN coatings
TiN coatings
Heike Bartsch de Torres
2001-10-17
I need a offerer for TiN coatings, sputtered bottom up on glass
substrates of 4" diameter. The layer should be 200nm thick and should
have a specific resistance of 3Ohm/square.
I4d be very pleased, if someone could give me a contact of a company,
which is aible to do such kind of coatings.
Thanks to all,

Heike Bartsch de Torres
Dev. Eng.
Little Things Factory GmbH
Ehrenbergstr. 11
D- 98693 Ilmenau
Germany
mailto: HB@LTF-GMBH.DE

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