dear all,


         i'm ramakrishna working with quartz micromachining project. i've to
realize few funny structures on fused quartz substrate. i did seveal infructuous
attempts to achieve so, with conc. HF & BHF(including at elevated
temperatures). for this i've been choosen Cr/Au metallization at 120C temp. the
problem is while etching, at sometime the Au is starting peels off. i need thru
hole on this quartz substrate. i hope one can understand mi problem. i need the
info about related journals, books etc.,


thanks in advance.


yours.,


T.Ramakrishna,






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