David, What do you want to sputter on them ? What layers and thickness. Do you also need the wafers supplied ? I work with several local sputtering houses. Email me and I am sure I can help. Regards, Ken "Volfson, David" wrote: > > Could someone recommend a vendor that can sputter coat 6" wafers? > > David Volfson > Zygo TeraOptix > 20 Walkup Drive > Westborough, MA 01581 > 508-389-1760 x3095 > 508-389-1758 fax Kmbh Associates 4968 Charter Road Rocklin, CA 95765 U S A 510-714-5055 Efax- 510 217 4421 or 561 658 6136 High Purity Float Zone and Specialty CZ Silicon for Power, IR and Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor applications. Service in SOI, Polishing SSP and DSP.