Hello, everybody,

Can anyone recommend a company that can provide
good DRIE service? My work is to etch some Si structures
composed by some beams. The minimum feature size may
be as small as 5um or can be a few tens um, the depth
is between 60-80um. The problem is, there'll be a sharp
angle between two beams, as small as 5 degree, and a
gap might be around 1-2um. I'm worried that these features
are not easy to obtain.

Thank you very much for your attention. I shall appreciate
your any information.

Shaoning