durusmail: mems-talk: Re: processing information wanted
Re: processing information wanted
Re: processing information wanted
Gang Lin
1996-06-09
> 1. We want to deposit a patterned metal film onto polyimide. Any
> suggestion regarding suitable metals that give at lweast some modest
> adhesion?
Here is what I did:
deposit about 50 angstrom Cr as adhesion layer, and then use evaporator /
sputter to put 0.1 micron Au / Pt on the polyimide. I got pretty decent
adhesion.

Gang Lin
Louisiana Tech University


reply