durusmail: mems-talk: Fabrication of micro structure based on PMMA
Fabrication of micro structure based on PMMA
2001-11-03
2001-11-05
Fabrication of micro structure based on PMMA
reinhardt
2001-11-05
www.microtec-d.de may have a solution for your product, please
email further details to cad@microtec-d.com

Best regards
Andrea
----- Original Message -----
From: "Wong Tak Sing" 
To: 
Sent: Saturday, November 03, 2001 6:23 AM
Subject: [mems-talk] Fabrication of micro structure based on PMMA


> Hi MEMS people,
>
>   I would like to ask whether there are ways to make a micro structure
(depth:200um, length:10mm, width:5mm) on the PMMA substrate.  The micro
strucure is made of PMMA.  Could anyone suggest me the way how to fabricate
the structure (by etching, laser cutting etc.)?
>
>   Thank you in advance!
>
> Victor
> Student Researcher
> Center for Micro and Nano Systems
> The Chinese University of Hong Kong
>
>
>
>
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