durusmail: mems-talk: photoresist heat capacity
photoresist heat capacity
ion imlant depth vs energy for As, B, etc
2001-11-06
photoresist heat capacity
Andrey Bayrashev
2001-11-05
Hi,
I was wondering if anybody knows the specific heat capacity and the dielectric
loss tangent of S1818 or some other Shipley photoresist. Unfortunately, the
company doesn't have that information...
Any help would be highly appreciated.
Thank you in advance,
Andrey Bayrashev

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