durusmail: mems-talk: ion imlant depth vs energy for As, B, etc
photoresist heat capacity
ion imlant depth vs energy for As, B, etc
2001-11-06
ion imlant depth vs energy for As, B, etc
jaideep mavoori
2001-11-06
Hello.
Is there a table/software for calculating ion implant depth vs energy for
various tilt angles for various species and substrates (Si primarily).

Thanks.
Jaideep

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