durusmail: mems-talk: Re: Silicon Fusion Bond Strength
Re: Silicon Fusion Bond Strength
1996-06-06
1996-06-07
1996-06-10
1996-06-11
1996-06-11
Re: Silicon Fusion Bond Strength
marcus@tesla.njit.edu
1996-06-11
That may very well be the case, but nonethe less a feqw years ago I was
impressed with the strength of an anodic bond formed between glass and silicon.
The glass was a cover glass and the bond was formed with a few 100 V and low T
(~200C). A "nail" epoxy bonded to the glass pulled a chunk of silicon from
itseldf at the "failure point".


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