Hello,

you can download SRIM (including implantation and sputtering) from James
Ziegler's homepage http://www.SRIM.org or from IBM's website
http://www.research.ibm.com/ionbeams/SRIM/SRIMLEGL.HTM .

Regards

Burkhard Volland

P.S.: Please let us know if the program was useful for your problem.

-----Urspr|ngliche Nachricht-----
Von: Sonia Garcia Blanco 
An: jaideep mavoori 
Cc: mems-talk@memsnet.org 
Datum: Donnerstag, 8. November 2001 23:40
Betreff: Re: [mems-talk] ion imlant depth vs energy for As, B, etc


>Dear Jaideep,
>
>You can try the software TRIM that simulates the penetration of ions of
>different energies on different materials by MonteCarlo simulations.
>
>I think you can find it on the Web....
>
>Good luck!
>
>Sonia.
>
>*****************************************************
>
>Sonia Garcia-Blanco
>
>Department of Electronics and Electrical Engineering
>University of Glasgow
>Oakfield Ave.
>G12 8LT
>Glasgow
>
>Phone:
>   Office: (0141) 339 8855 ext 0101
>   Lab:    (0141) 330 6014
>Email: sgblanco@elec.gla.ac.uk
>
>****************************************************
>
>On Mon, 5 Nov 2001, jaideep mavoori wrote:
>
>> Hello.
>> Is there a table/software for calculating ion implant depth vs energy for
>> various tilt angles for various species and substrates (Si primarily).
>>
>> Thanks.
>> Jaideep
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