Kyu-Tae Yoo,

For your information, Optonor AS is doing static and vibration measurements on
such membranes in Trondheim, Norway, if this is of interest to you.

-----------------------------------------------------
Eiolf Vikhagen
Optonor AS
www.optonor.com
Phone  +47 73 50 20 20
Fax  +47 73 50 20 22


----- Original Message -----
From: "Kyutae Yoo" 
To: 
Sent: Friday, November 09, 2001 1:20 AM
Subject: [mems-talk] stressed membrane simulation using ANSYS


> Hello All,
>
> Does anyone know how to simulate a tensile stressed membrane
> using ANSYS? I have done modal, static, and harmonic analysis
> without any stress in the membrane using ANSYS, but since I am
> going to fabricate the membrane out of LPCVD SiN, I am expecting
> to have some intrinsic tensile stress (100~200 MPa) in reality.
> So, how do I include this tensile stress effect for the analysis?
> By the way, we use ANSYS 5.7
> Thank you for your help
>
> Q
> ____________________________________________________________________
> > Ph.D. candidate
>
> Cornell University                       Phone:530-752-2522(office)
> #117 Phillips Hall                            :530-902-5153(cell)
> Computer and Electrical Engineering           :530-297-5153(Home)
> Ithaca, NY  14853-5401                   eFax :509-463-1127
> _______________________________________________
> mems-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://fab.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/