"xinyu li"wrote: > > Does anybody know the relationship between PZT film thickness and > applying voltage and frequency In a conventionally poled PZT, the voltage required for a certain induced strain is directly proportional to the thickness (distance between electrodes) if the material properties are constant. And the through-thickness (33) extension and shear mode resonant frequencies are both inversely proportional to thickness. But it seems that the piezoelectric coefficients decrease significantly with film thickness. See for example: L. Lian and N.R. Sottos, "Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films", Journal of Applied Physics, vol. 87, #8, pp. 3941-3949 (April 2000). They attribute it to residual stresses. Good luck, and let us know your results. ----------------------------------------------------------------------- Dr Emilio P. Calius Research Engineer: Smart Materials and Structures Industrial Research Limited PO Box 2225, Auckland, New Zealand Ph: +64 9 303 4116, Fax: +64 9 307 0618