durusmail: mems-talk: wire bonding on top of Polysilicon
MEMS contact pressure sensor
2001-11-02
wire bonding on top of Polysilicon
2001-11-12
wire bonding on top of Polysilicon
Yong Zhu
2001-11-12
Dear Friends,

Usually people do wire bonding on top of Metal. In my project, the
Polysilicon
is doped and conductive. I would like to do wire bonding directly rather
than
sputtering one more layer of metal on top of Poly. Thanks.

Best regards,

Yong