On Tue, 11 Jun 1996, Michael Young wrote: > Dear MEMS, > I am currently having problems electroplating small nickel > features (typically a few microns) through thick photoresist. I am unable > to get the electroplating solution (Nickel sulphate based) into all the > resist openings due to the high aspect ratios and small > dimensions. I would be grateful if anyone could suggest a suitable > wetting agent to overcome this problem. > > Cheers, > Mike Young. > > > Here at LSU, we use Lauryl Sulfate (about 1gram/l) as a wetting agent for electroplating in high aspect ratio structures. So far we have been to electroplate 1.8um diameter x 12um height holes. We've also made 10um diameter x 100um posts. Yohannes M. Desta ____________________________________________________ ________| LSU mSET (microSystems Engineering Team) |________ \ | Dept. of Mech. Engr., Baton Rouge LA 709803 | / \ | PH: (504)388-6602 FAX: (504) 388-5924 | / / |____________________________________________________| \ /___________) (__________\