durusmail: mems-talk: Low Stress Nitride
Low Stress Nitride
2001-11-19
2001-11-20
2001-11-20
Low Stress Nitride
Kenneth Smith
2001-11-20
Roger,

You check with Strataglas in Mt View ? Not sure they can do the 2um, but
can do <1 Mpa (typical) Low Stress Nitride (SixNx).

If you need wafers to put it on, let me know.

Regards,
Ken

Roger Shile wrote:
>
> JDS Uniphase in NC do low stress, low stress gradient SiN service.
> The contact is:
> Chris Sanders
> (919)314-2258
>
> >>> Roger Neef  11/19/01 03:17PM >>>
> Hi,
>
> Does anyone know where I can get service for the following.
>
> Low stress PECVD nitride
> 2 um thick
>
> Thank you for your help.
>
> Regards,
>
> Roger
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