Hello
We are working on fabrication of quartz MEMS. We use single crystalline z-cut
quartz substrate of 150 micron thick and do the etching in HF based solution.
However, after thorough etching it is observed that along x-axis one side is
completely vertical whereas other side is not vertical, there is nodge of
about 30-40 microm length. How to make vertical sidewall at both side?
Do anyne has any idea?
Thanks
Dr. Soumen Das
Sr. Scientific Officer
Microelectronics Centre
Dept. of Electronics & ECE
Indian Institute of Technology
Kharagpur 721 302, India
email: sou@ece.iitkgp.ernet.in
Phone: +91-3222-81914 (O)
            +91-3222-81475 (Lab)
            +91-3222-81915 (R)
Fax: +91-3222-755303/777190