I suspect you need an adhesion layer. A thin layer of Cr or Ti/W should
work well for you.

-Michael P.

Rajsekhar Popuri wrote:

> Hello,
>
> I am trying to do a lift-off.I sputter coated gold-palladium of 2000A
> thickness on a glass wafer.When i tried to do a lift-off with
> acetone-methanol,gold-palladium layer was completely peeled off the
> glass wafer.Can anyone tell me the reason for this and suggest a
> suitable process to do a lift-off with gold-palladium.
>
> Thanks in advance
> Rajsekhar.
>
>
>
>
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