durusmail: mems-talk: lift-off
lift-off
lift-off
Bruno Wacogne
2001-12-07
Hi,

Usually, gold does not adhere to the glass. A thin Cr layer is required
between the glass wafer and the gold layer in order to improve the adhesion
of gold.

good luck
Bruno


At 10:09 07/12/2001 -0500, you wrote:
>Hello,
>
>I am trying to do a lift-off.I sputter coated gold-palladium of 2000A
>thickness on a glass wafer.When i tried to do a lift-off with
>acetone-methanol,gold-palladium layer was completely peeled off the glass
>wafer.Can anyone tell me the reason for this and suggest a suitable process
>to do a lift-off with gold-palladium.
>
>Thanks in advance
>Rajsekhar.
>
>
>
>
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