durusmail: mems-talk: KOH wet etching station
KOH wet etching station
2001-12-10
2001-12-10
KOH wet etching station
^Frank ^
2001-12-10
Dear all,

I am wondering whether there is a kind of wet etching station that can
precisely control the bath temperature, the stirrer speed and rinse clean
the wafer?

Thanks,

frank

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