Dear Frank: Ultrasil corp. has etching station for wafer processing. Digital control has resolution 0.1 degree C. If this will be OK please contact us. We can help you. Also Ultrasil is one the largest producer of SOI wafers custom made with device thickness from 5um up. Tolerance +/-0.5um and up. Diameters 3" to 150 mm.. We offer the best price and delivery possible. Visit us at www.ultrasil.com for more information ---------------- John Dancovich 3527 Breakwater Ave Hayward CA 94545 Ph: 510-266-3700 Fx; 510-266-3720 e-mail: ultrasil@aol.com