Hi everybody,

does anybody know in which way one could etch Z-cut quartz wafers (by means of a
wet etching process) into important depths? In fact, the information that I need
is about the etchant composition which allows to obtain a smooth surface at the
end of the etching process. It is well known that the roughness of the surface
depends on the etchant, but what are those etchants that improve the smoothness?

If you have some references or some experience on this area, I'm ready to talk
about.

Regards,

Liviu