If you do reverse RCA clean (no HF dip) on native oxide, it will make your
surface hydrophilic...

Best Regards,
Rafiqul Islam


EV Group Inc.- Technology- Tel: (602) 437 9492 x 118, (602)2842134
(cell),Fax: (602) 437 9435,
e-mail: R.Islam@EVGroup.com web: www.EVGroup.com


-----Original Message-----
From: Liz Shelley [mailto:lshelley@micrometrics.com]
Sent: Wednesday, December 12, 2001 5:47 AM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] any hydrophillic layer?


How thick a coating is necessary?
Any method of growing (even a native oxide) on silicon will cause the
surface to become hydrophillic.  H2O2 exposure will do.

> From: jung hoon yeom 
> Reply-To: mems-talk@memsnet.org
> Date: Tue, 11 Dec 2001 15:11:59 -0600 (CST)
> To: 
> Subject: [mems-talk] any hydrophillic layer?
>
> Dear folks in the mems community
>
> I'd like to do conformal deposition on the Si substrate and modify it to
> hydrophillic surface(not hydrophobic) regardless of its thickness. And I
> am open to any kind of pocessing.
>
> Thanks
>
> Junghoon Yeom   University of Illinois at Urbana-Champaign
> Research Assistant  Department of Mechanical & Industrial Engr
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